fractional factorial experiment

基本解釋

A fairly large fractional factorial experiment on epi growth was performed, with spatial measurements of thickness and resistivity.
一串制程因子的實(shí)驗(yàn)設(shè)計(jì)，以晶圓薄膜厚度近九點(diǎn)量測(cè)。
The experiment factors and levels were firstly selected by the single-factor test. And then, the influences of significant factors were evaluated using a fractional factorial design.
首先通過(guò)單因素實(shí)驗(yàn)對(duì)發(fā)酵條件進(jìn)行初步優(yōu)化，然后利用二水平正交試驗(yàn)直觀分析確定影響因素的主次順序。