photolithograph

基本解釋

The micromachining process like photolithograph, electroplate and sputtering etc is adopted to fabricate the stator of MGELR.
采用了光刻、電鍍、濺射等微細(xì)加工工藝制造了MGELR的定子。
They include laser doping, laser annealing, laser depositing film, solid-phase reaction induced by laser and laser photolithograph.
這些應(yīng)用大致涵蓋激光摻雜、激光退火、激光沉積薄膜、激光引發(fā)固相反應(yīng)和激光光刻等幾方面。
The fabrications of glass microfluidic chips by using photolithograph, wet etching and thermal bonding methods and PMMA microfluidic chip by hot embossing and direct bonding methods were studied.
采用熱壓和鍵合的方法制作玻璃和有機(jī)聚合物（PMMA）芯片，對玻璃和PMMA芯片在高壓直流電場作用下的伏安特性進(jìn)行了研究和分析。

光刻
We also explored the different technology process such as photolithograph, strip and grinding the facet of the substrate, obtained good technology parameters.
在實(shí)驗(yàn)方面，我們也對光刻、剝離、磨片等工藝步驟進(jìn)行了探索，找到了較好的工藝參數(shù)。
能源科學(xué)技術(shù)
光刻
So, it will promote MEMS research if we can fabricate high-aspect microstructures by combining common uv-photolithograph technology and other MEMS techniques .
因此,如能采用常規(guī)的紫外線光刻,結(jié)合其它的MEMS 技術(shù)制作可動(dòng)微結(jié)構(gòu)將會(huì)大大推動(dòng)MEMS 的研究工作。